One Step Fabrication of Hierarchical Silicon Surfaces and Modification of its Morphology
- One Step Fabrication of Hierarchical Silicon Surfaces and Modification of its Morphology
- 임근배; 조성진; 석세영; 안태창
- POSTECH Authors
- Date Issued
- Micro resist technology GmbH
- Article Type
- 37th International Conference on Micro and Nano Engineering (MNE 2011), 2011-09-19
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