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One Step Fabrication of Hierarchical Silicon Surfaces and Modification of its Morphology

Title
One Step Fabrication of Hierarchical Silicon Surfaces and Modification of its Morphology
Authors
임근배조성진석세영안태창
POSTECH Authors
임근배
Date Issued
19-Sep-2011
Publisher
Micro resist technology GmbH
URI
http://oasis.postech.ac.kr/handle/2014.oak/59213
Article Type
Conference
Citation
37th International Conference on Micro and Nano Engineering (MNE 2011), 2011-09-19
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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