Prediction Model of Microlens Fabricated by Modified LIGA Process
- Prediction Model of Microlens Fabricated by Modified LIGA Process
- 김동성; 권태헌; 이승섭; 이성근; 양상식
- POSTECH Authors
- 김동성; 권태헌; 이승섭
- Date Issued
- Nano Science and Technology Institute
- Article Type
- The fifth international conference on MSM (Modeling and Simulation of Microsystems) 2002, 2002-04-23
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