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접촉식 면적변화형 정전용량 변위센서의 접촉 안정성을 위한 기구의 개발

Title
접촉식 면적변화형 정전용량 변위센서의 접촉 안정성을 위한 기구의 개발
Authors
문원규김성주이원구
POSTECH Authors
문원규
Date Issued
26-May-2011
Publisher
대한기계학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/58748
Article Type
Conference
Citation
2011 KSME 마이크로/나노공학부문 춘계학술대회, 2011-05-26
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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