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접촉식 면적변화형 전기용량 변위센서의 분해능 향상을 위한 연구
- Title
- 접촉식 면적변화형 전기용량 변위센서의 분해능 향상을 위한 연구
- Date Issued
- 2011-06-01
- Publisher
- 한국정밀공학회
- Article Type
- Conference
- Citation
- 한국정밀공학회, 2011-06-01
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg