Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백성기 | - |
| dc.contributor.author | 박용준 | - |
| dc.contributor.author | 김석훈 | - |
| dc.contributor.author | 이동열 | - |
| dc.contributor.author | 송문균 | - |
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-18T01:21:34Z | - |
| dc.date.available | 2018-06-18T01:21:34Z | - |
| dc.date.created | 2011-04-11 | - |
| dc.date.issued | 2008-08-06 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/58543 | - |
| dc.publisher | "Korea-Japan | - |
| dc.relation.isPartOf | KJC-FE07 | - |
| dc.title | In-situ synchrotron X-ray scattering study on the initial structure of Ta(C)N Atomic Layer Deposition films for the electronic devices. | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | KJC-FE07 | - |
| dc.citation.conferenceDate | 2008-08-06 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | KJC-FE07 | - |
| dc.contributor.affiliatedAuthor | 백성기 | - |
| dc.contributor.affiliatedAuthor | 박용준 | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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