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Synchrotron X-ray Scattering Study of the Initial Stage of Thin Film Growth by ALD.

Title
Synchrotron X-ray Scattering Study of the Initial Stage of Thin Film Growth by ALD.
Authors
백성기박용준손영욱이기봉이현희정훈영
Date Issued
5-Jul-2010
Publisher
AOFSRR
URI
http://oasis.postech.ac.kr/handle/2014.oak/58523
Article Type
Conference
Citation
5th AOFSRR, 2010-07-05
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