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Cobalt Atomic Layer Deposition for Nanoscale Contact Applications
- Title
- Cobalt Atomic Layer Deposition for Nanoscale Contact Applications
- Date Issued
- 2008-08-01
- Publisher
- 1st International Conference on Microelectronics and Plasma Technology
- Article Type
- Conference
- Citation
- 1st International Conference on Microelectronics and Plasma Technology, 2008-08-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg