In-situ synchrotron X-ray scattering study on the initial structure of Ta(C)N Atomic Layer Deposition films for the electronic devices
- Title
- In-situ synchrotron X-ray scattering study on the initial structure of Ta(C)N Atomic Layer Deposition films for the electronic devices
- Authors
- 박용준; 김석훈; 이동렬; 송문균; 이시우; 백성기
- Publisher
- KJCFE07
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/51602
- Article Type
- Conference
- Citation
- KJCFE07
- Files in This Item:
- There are no files associated with this item.
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