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RF 자기 쉬스와 헬리컬 공진기형 플라즈마 발생 장치의 모델링 및 측정 분석

Title
RF 자기 쉬스와 헬리컬 공진기형 플라즈마 발생 장치의 모델링 및 측정 분석
Authors
박종철
Date Issued
1999
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899735
http://oasis.postech.ac.kr/handle/2014.oak/4962
Article Type
Thesis
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