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Al2O3/HfO2 Moisture Barrier Films on Polymer Grown by Plasma-Enhanced Atomic Layer Deposition

Title
Al2O3/HfO2 Moisture Barrier Films on Polymer Grown by Plasma-Enhanced Atomic Layer Deposition
Authors
박찬언김래호장진혁박선욱정용진백용화
Date Issued
2016-04-07
Publisher
한국고분자학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/49584
Article Type
Conference
Citation
한국고분자학회 2016 춘계학술대회, 2016-04-07
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박찬언PARK, CHAN EON
Dept. of Chemical Enginrg
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