Thesis
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이문석 | en_US |
| dc.date.accessioned | 2015-02-24T14:39:14Z | - |
| dc.date.available | 2015-02-24T14:39:14Z | - |
| dc.date.issued | 1999 | en_US |
| dc.identifier.other | OAK-2015-02494 | en_US |
| dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899647 | en_US |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/4874 | - |
| dc.description | Doctor | en_US |
| dc.language | kor | en_US |
| dc.publisher | 포항공과대학교 | en_US |
| dc.rights | BY_NC_ND | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
| dc.title | 0.1μm 영역의 X-선 리소그래피에서의 패턴의 특성분석에 관한연구 | en_US |
| dc.title.alternative | A Study on the Characterization of Pattern Quality in0.1μm Regime X-ray Lithography | en_US |
| dc.type | Thesis | en_US |
| dc.contributor.college | 일반대학원 전자전기공학과 | en_US |
| dc.date.degree | 1999-02 | en_US |
| dc.type.docType | Thesis | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.