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Transparent Al2O3/HfO2 Thin Film Encapsulation Grown by Plasma-Enhanced Atomic Layer Deposition
- Title
- Transparent Al2O3/HfO2 Thin Film Encapsulation Grown by Plasma-Enhanced Atomic Layer Deposition
- Date Issued
- 2016-10-05
- Publisher
- 한국고분자학회
- Article Type
- Conference
- Citation
- 한국고분자학회 2016 추계학술대회, 2016-10-05
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Related Researcher
- 박찬언PARK, CHAN EON
- Dept. of Chemical Enginrg