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Cleaning 10nm ceramic contaminants by the supersonic particle beam
- Title
- Cleaning 10nm ceramic contaminants by the supersonic particle beam
- Authors
- 이진원
- Date Issued
- 2010-08-23
- Publisher
- Materials Research Society
- Article Type
- Conference
- Citation
- IUMRS-ICEM 2010, 2010-08-23
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg