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Drift Compensation Technique of an Area-varying Capacitive Displacement Sensor for Nanometer Resolution
- Title
- Drift Compensation Technique of an Area-varying Capacitive Displacement Sensor for Nanometer Resolution
- Date Issued
- 2010-08-17
- Publisher
- IEEE-NANO 2010
- Article Type
- Conference
- Citation
- IEEE-NANO 2010, 2010-08-17
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg