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A technique for drift compensation of an area-varying capacitive displacement sensor for nano-metrology
- Title
- A technique for drift compensation of an area-varying capacitive displacement sensor for nano-metrology
- Date Issued
- 2010-09-05
- Publisher
- Eurosensors XXIV
- Article Type
- Conference
- Citation
- Eurosensors XXIV, 2010-09-05
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg