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Quantitative Structure and Property Analysis of Nanoporous Low-k SiCOH Thin Films using GISAXS and X-ray Reflectivity
- Title
- Quantitative Structure and Property Analysis of Nanoporous Low-k SiCOH Thin Films using GISAXS and X-ray Reflectivity
- Authors
- 이문호; 최준만; 허규용; Sung-Gyu Park; 이택준; 진상우; 박삼대; 김진철; 김동민; 정정운; 노예철; 안병철; 권원상; 김경태; 김미희; 고용기; 정성민
- Date Issued
- 2009-11-30
- Publisher
- 4th Asia-Oceania Forum for Synchrotron Radiation Research
- Article Type
- Conference
- Citation
- 4th Asia-Oceania Forum for Synchrotron Radiation Research, 2009-11-30
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry