Open Access System for Information Sharing

Login Library

 

Conference
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Quantitative Structure and Property Analysis of Nanoporous Low-k SiCOH Thin Films using GISAXS and X-ray Reflectivity

Title
Quantitative Structure and Property Analysis of Nanoporous Low-k SiCOH Thin Films using GISAXS and X-ray Reflectivity
Authors
이문호최준만허규용Sung-Gyu Park이택준진상우박삼대김진철김동민정정운노예철안병철권원상김경태김미희고용기정성민
POSTECH Authors
이문호
Date Issued
2009-11-30
Publisher
4th Asia-Oceania Forum for Synchrotron Radiation Research
URI
https://oasis.postech.ac.kr/handle/2014.oak/46369
Article Type
Conference
Citation
4th Asia-Oceania Forum for Synchrotron Radiation Research, 2009-11-30
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher

이문호REE, MOONHOR
Dept of Chemistry
Read more

Views & Downloads

Browse