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Effects of Extension Profile Engineering to Suppress Boron TED on the Reliability of High-k/Metal Gate SiGe pMOSFETS

Title
Effects of Extension Profile Engineering to Suppress Boron TED on the Reliability of High-k/Metal Gate SiGe pMOSFETS
Authors
이정수
Date Issued
2009-08-26
Publisher
IEEE
URI
https://oasis.postech.ac.kr/handle/2014.oak/45940
Article Type
Conference
Citation
IEEE International Symposium on Advanced Gate Stack Technology, 2009-08-26
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이정수LEE, JEONG SOO
Dept of Electrical Enginrg
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