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Optimization of semi-conductor manufacturing process considering the uniform quality of chips within single wafer

Title
Optimization of semi-conductor manufacturing process considering the uniform quality of chips within single wafer
Authors
김광재김현진곽도순
Date Issued
2009-08-27
Publisher
Korean Society for Quality Management
URI
https://oasis.postech.ac.kr/handle/2014.oak/45645
Article Type
Conference
Citation
The KOREA-CHINA Quality Symposium, 2009-08-27
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김광재KIM, KWANG JAE
Dept. of Industrial & Management Eng.
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