Open Access System for Information Sharing

Login Library

 

Conference
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

A Modeling Approach to Optimize Semiconductor Fabrication Process Considering Uniformity

Title
A Modeling Approach to Optimize Semiconductor Fabrication Process Considering Uniformity
Authors
김광재김현진곽도순
POSTECH Authors
김광재
Date Issued
14-Dec-2009
Publisher
APIEMS
URI
http://oasis.postech.ac.kr/handle/2014.oak/45621
Article Type
Conference
Citation
The 10th Asia Pacific Industrial Engineering and Management Systems Conference, 2009-12-14
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher

김광재KIM, KWANG JAE
Dept of Industrial & Management Enginrg
Read more

Views & Downloads

Browse