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Atomic later deposition을 이용한 Hf-silicate 박막 증착과 이를 이용한 펜타센 박막 트랜지스터의 성능 향상

Title
Atomic later deposition을 이용한 Hf-silicate 박막 증착과 이를 이용한 펜타센 박막 트랜지스터의 성능 향상
Authors
용기중이승협
POSTECH Authors
용기중
Date Issued
6-Nov-2009
Publisher
한국재료학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/44122
Article Type
Conference
Citation
추계학술발표대회 및 제 17회 신소재 심포지엄, 2009-11-06
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용기중YONG, KIJUNG
Dept. of Chemical Enginrg
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