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A Modeling Approach to Optimize Semiconductor Fabrication Process Considering Uniformity
- Title
- A Modeling Approach to Optimize Semiconductor Fabrication Process Considering Uniformity
- Date Issued
- 2009-12-14
- Publisher
- APEIMS
- Article Type
- Conference
- Citation
- APIEMS (Asia-Pacific Industrial Engineering and Management Systems), 2009-12-14
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Related Researcher
- 김광재KIM, KWANG JAE
- Dept. of Industrial & Management Eng.