Open Access System for Information Sharing

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

All 0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Showing results 1 to 1 of 1

Issue Date	Title
2000-Jan	Dose and shape modification proximity effect correction for forward-scattering range scale features in electron beam lithography JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol. 39, no. 12B, page. 6827 - 6830, 2000-01 Seo, E; Kim, O

OAK