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Article
Recent progress on metasurfaces: applications and fabrication
SCIE
SCOPUS
JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 54, no. 38, 2021-09
Yoon, Gwanho
;
Tanaka, Takuo
;
Zentgraf, Thomas
;
Rho, Junsuk
1
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colloidal lithography
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direct laser writing
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EFFICIENCY
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FULL
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large-scale nanofabrication
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LITHOGRAPHY
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nanoimprint lithography
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PHASE DISCONTINUITIES
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PLASMONIC METASURFACES
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self-organization
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