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Showing results 1 to 6 of 6
Article

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol. 37, no. 6A, page. 3252 - 3256, 1998-06

Article

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 16, no. 5, page. 2725 - 2728, 1998-09

Article

JOURNAL OF ELECTRONIC MATERIALS, vol. 23, no. 12, page. 1335 - 1341, 1994-12

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