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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 제정호 | - |
| dc.contributor.author | 오운철 | - |
| dc.date.accessioned | 2017-07-19T04:45:12Z | - |
| dc.date.available | 2017-07-19T04:45:12Z | - |
| dc.date.created | 2009-03-26 | - |
| dc.date.issued | 1989-01 | - |
| dc.identifier.issn | 1226-4873 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/33332 | - |
| dc.language | Korean | - |
| dc.publisher | . | - |
| dc.relation.isPartOf | 연구기보 | - |
| dc.title | 플라즈마 화학증착법에 의한 SI3N4박막 제조 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | 연구기보, v.3, no.4, pp.79 - 83 | - |
| dc.citation.endPage | 83 | - |
| dc.citation.number | 4 | - |
| dc.citation.startPage | 79 | - |
| dc.citation.title | 연구기보 | - |
| dc.citation.volume | 3 | - |
| dc.contributor.affiliatedAuthor | 제정호 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- 제정호JE, JUNG HO
- Dept of Materials Science & Enginrg