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ICP(INDUCTIVELY COUPLED PLASMA) 처리에 따른 N-TYPE SIGE/METAL CONTACT의 SBH(SCHOTTKY BARRIER HEIGHT) 연구
- Title
- ICP(INDUCTIVELY COUPLED PLASMA) 처리에 따른 N-TYPE SIGE/METAL CONTACT의 SBH(SCHOTTKY BARRIER HEIGHT) 연구
- POSTECH Authors
- 제정호
- Date Issued
- 2005-01
- Publisher
- 대한금속재료학회
- ISSN
- 1226-4873
- Article Type
- Article
- Citation
- 대한금속·재료학회지, vol. 43, no. 2, page. 132136, 2005-01
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Related Researcher
- 제정호JE, JUNG HO
- Dept of Materials Science & Enginrg