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저온 규소 산화막의 원격 플라즈마 화학 증착
- Title
- 저온 규소 산화막의 원격 플라즈마 화학 증착
- Authors
- 강진규
- Date Issued
- 1993
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897746
https://oasis.postech.ac.kr/handle/2014.oak/2976
- Article Type
- Thesis
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