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3-D Observation of Dopant Distribution at NAND Flash Memory Floating Gate

Title
3-D Observation of Dopant Distribution at NAND Flash Memory Floating Gate
Authors
Lee J.-H.Chae B.-K.Kim J.-J.Lee S.Y.Park C.G.박찬경
Date Issued
Jan-2015
Publisher
Electron. Mater. Lett
URI
http://oasis.postech.ac.kr/handle/2014.oak/27198
DOI
10.1007/S13391-014-4194-3
ISSN
1738-8090
Article Type
ARTICLE
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