Development of separated micromold system for an efficient replication of high aspect ratio microstructures
SCIE
SCOPUS
- Title
- Development of separated micromold system for an efficient replication of high aspect ratio microstructures
- Authors
- Bong-Kee Lee; Kwon, TH
- Date Issued
- 2010-08
- Publisher
- SPRINGER
- Abstract
- In the present study, a separated micromold system (SMS) is newly proposed and developed for an efficient replication of high aspect ratio microstructures. The present SMS basically consists of micromold modules, each having a split structure of the complete microstructure to be replicated. So fabricated micromold modules are assembled for a replication of the microstructures and subsequently separated in a demolding stage. In this manner, serious problems commonly encountered in a conventional fabrication process for high aspect ratio structures can be effectively overcome. For a precise fabrication of the micromold modules, a deep X-ray lithography and nickel electroforming processes were carried out, resulting in nickel SMS including various half circular microstructures. By utilizing the obtained SMS modules, high aspect ratio micro-scale cilium structure and its array were successfully replicated by a hot embossing process.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/25767
- DOI
- 10.1007/S00542-009-0990-3
- ISSN
- 0946-7076
- Article Type
- Article
- Citation
- MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, vol. 16, no. 8-9, page. 1385 - 1392, 2010-08
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