DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chen, YT | - |
dc.contributor.author | Lo, TN | - |
dc.contributor.author | Chu, YS | - |
dc.contributor.author | Yi, J | - |
dc.contributor.author | Liu, CJ | - |
dc.contributor.author | Wang, JY | - |
dc.contributor.author | Wang, CL | - |
dc.contributor.author | Chiu, CW | - |
dc.contributor.author | Hua, TE | - |
dc.contributor.author | Hwu, Y | - |
dc.contributor.author | Shen, Q | - |
dc.contributor.author | Yin, GC | - |
dc.contributor.author | Liang, KS | - |
dc.contributor.author | Lin, HM | - |
dc.contributor.author | Je, JH | - |
dc.contributor.author | Margaritondo, G | - |
dc.date.accessioned | 2016-04-01T01:12:43Z | - |
dc.date.available | 2016-04-01T01:12:43Z | - |
dc.date.created | 2009-02-28 | - |
dc.date.issued | 2008-10-01 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.other | 2008-OAK-0000008060 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/22558 | - |
dc.description.abstract | The fabrication of devices to focus hard x-rays is one of the most difficult-and important-challenges in nanotechnology. Here we show that Fresnel zone plates combining 30 nm external zones and a high aspect ratio finally bring hard x-ray microscopy beyond the 30 nm Rayleigh spatial resolution level and measurable spatial frequencies down to 20-23 nm feature size. After presenting the overall nanofabrication process and the characterization test results, we discuss the potential research impact of these resolution levels. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.relation.isPartOf | NANOTECHNOLOGY | - |
dc.subject | E-BEAM LITHOGRAPHY | - |
dc.subject | ZONE PLATES | - |
dc.subject | FABRICATION | - |
dc.subject | RESOLUTION | - |
dc.title | Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement | - |
dc.type | Article | - |
dc.contributor.college | 신소재공학과 | - |
dc.identifier.doi | 10.1088/0957-4484/19/39/395302 | - |
dc.author.google | Chen, YT | - |
dc.author.google | Lo, TN | - |
dc.author.google | Chu, YS | - |
dc.author.google | Yi, J | - |
dc.author.google | Liu, CJ | - |
dc.author.google | Wang, JY | - |
dc.author.google | Wang, CL | - |
dc.author.google | Chiu, CW | - |
dc.author.google | Hua, TE | - |
dc.author.google | Hwu, Y | - |
dc.author.google | Shen, Q | - |
dc.author.google | Yin, GC | - |
dc.author.google | Liang, KS | - |
dc.author.google | Lin, HM | - |
dc.author.google | Je, JH | - |
dc.author.google | Margaritondo, G | - |
dc.relation.volume | 19 | - |
dc.relation.issue | 39 | - |
dc.contributor.id | 10123980 | - |
dc.relation.journal | NANOTECHNOLOGY | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | NANOTECHNOLOGY, v.19, no.39 | - |
dc.identifier.wosid | 000258538800009 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.number | 39 | - |
dc.citation.title | NANOTECHNOLOGY | - |
dc.citation.volume | 19 | - |
dc.contributor.affiliatedAuthor | Je, JH | - |
dc.identifier.scopusid | 2-s2.0-51349139918 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 67 | - |
dc.type.docType | Article | - |
dc.subject.keywordPlus | E-BEAM LITHOGRAPHY | - |
dc.subject.keywordPlus | ZONE PLATES | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | RESOLUTION | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
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