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Domain structure of epitaxial PZT thin films grown on MgO(001) by RF magnetron sputtering SCIE SCOPUS

Title
Domain structure of epitaxial PZT thin films grown on MgO(001) by RF magnetron sputtering
Authors
Lee, KSKang, YMBaik, S
Date Issued
1997-01
Publisher
GORDON BREACH SCI PUBL LTD
Abstract
Epitaxial Pb(ZrxTi1-x)O-3 (x=0.0 similar to 0.32) thin-films were successfully grown on MgO(001) single crystal by RF magnetron sputtering. Lattice constants and crystal quality of the films were measured by the X-ray theta-2 theta scan and the FWHM of (001) rocking curves, respectively. Degree of c axis orientation and crystal quality of the films improved gradually with increasing Zr concentration. High temperature X-ray technique was employed to study the domain formation as a function of temperature during cooling from cubic phase to tetragonal phase. The initial values of a at the Curie temperature also increased with increasing Zr concentration.
Keywords
STRAIN RELAXATION; DEPOSITION; MGO(100)
URI
https://oasis.postech.ac.kr/handle/2014.oak/21352
DOI
10.1080/10584589708019975
ISSN
1058-4587
Article Type
Article
Citation
INTEGRATED FERROELECTRICS, vol. 14, no. 1-4, page. 43 - 49, 1997-01
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