Normal-incidence pulsed-laser deposition: better method for fabrication of multilayer structures

Abstract

A new normal-incidence pulsed-laser deposition method is presented. Fe/Mn multilayers were fabricated using both 45 degrees- and normal-incidence deposition of a pulsed laser and were characterized using the small-angle X-ray reflectivity measurement. This new method provides much better control of the lateral uniformity and layer thickness than the 45 degrees-incidence deposition method.