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Simulation of capacitively coupled single- and dual-frequency RF discharges

Title
Simulation of capacitively coupled single- and dual-frequency RF discharges
Authors
Lee, JKBabaeva, NYKim, HCManuilenko, OVShon, JW
Date Issued
Jan-2004
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGI
Keywords
capacitively-coupled plasmas; dual frequency; ion-energy distribution (IED); particle-in-cell (PIC) simulation; plasma potential; ELECTRON-ENERGY; 13.56 MHZ; PLASMA; MODEL; DYNAMICS; SHEATH; ION
URI
http://oasis.postech.ac.kr/handle/2014.oak/17969
DOI
10.1109/TPS.2004.823
ISSN
0093-3813
Article Type
Article
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 32, no. 1, page. 47 - 53, 2004-01
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