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Fabrication of hyperboloid-drum structure for electrically pumped laser of sub-micrometer to nanometer diameter active areas

Title
Fabrication of hyperboloid-drum structure for electrically pumped laser of sub-micrometer to nanometer diameter active areas
Authors
Kim, JYAn, SJKim, JLee, JWKang, BKKwon, OD
POSTECH Authors
Kang, BK
Date Issued
Jan-2004
Publisher
A V S AMER INST PHYSICS
Abstract
This article proposes a method of fabricating a hyperboloid-drum structure, which can be applied to an electrically pumped laser with an active-layer diameter as small as 100 nm, while maintaining a wide contact area for easy electrical connection. The structure is fabricated using conventional photolithography and the chemically assisted ion-beam etching (CAIBE) process with an Ar:Cl-2:BCl3 = 5:2:3 gas mixture. The process conditions for CAIBE and the size of etch mask are adjusted to obtain the required structure with a height of similar to8 mum, an active layer diameter of 0.1-2.0 mum, and a contact diameter larger than 4 mum. It is demonstrated that a laser device with an active layer diameter as small as 600 nm and a contact layer diameter of similar to5 mum can also be fabricated with the proposed method. (C) 2004 American Vacuum Society.
URI
http://oasis.postech.ac.kr/handle/2014.oak/17962
DOI
10.1116/1.1676485
ISSN
1071-1023
Article Type
Article
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 22, no. 2, page. 673 - 677, 2004-01
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강봉구KANG, BONG KOO
Dept of Electrical Enginrg
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