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Cited 138 time in webofscience Cited 140 time in scopus
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Maskless Plasmonic Lithography at 22 nm Resolution

Title
Maskless Plasmonic Lithography at 22 nm Resolution
Authors
Pan, LPark, YXiong, YUlin-Avila, EWang, YZeng, LXiong, SMRho, JSun, CBogy, DBZhang, X
POSTECH Authors
Rho, J
Date Issued
Nov-2011
Publisher
Nature Publishing Group
URI
http://oasis.postech.ac.kr/handle/2014.oak/12876
DOI
10.1038/SREP00175
ISSN
2045-2322
Article Type
Article
Citation
SCIENTIFIC REPORTS, vol. 1, no. 175, 2011-11
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노준석RHO, JUNSUK
Dept of Mechanical Enginrg
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