A compact, sample-in-atmospheric-pressure soft x-ray microscope developed at Pohang Light Source
SCIE
SCOPUS
- Title
- A compact, sample-in-atmospheric-pressure soft x-ray microscope developed at Pohang Light Source
- Authors
- Lim, J; Shin, HJ; Chae, KH; Hwang, CC; Hwang, HN; Hong, CK
- Date Issued
- 2010-06
- Publisher
- AMER INST PHYSICS
- Abstract
- A full-field transmission soft x-ray microscope (TXM) was developed at the Pohang Light Source. With a 2 mm diameter condenser zone plate and a 40 nm outermost-zone-width objective zone plate, the TXM's achieved spatial resolution is better than 50 nm at the photon energy of 500 eV (wavelength: 2.49 nm). The TXM is portable and mounted in tandem with a 7B1 spectroscopy end station. The sample position is outside the vacuum, allowing for quick sample changes and enhanced in situ experimental capability. In addition, the TXM is pinhole-free and easy to align, having commercial mounts located outside the vacuum components. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3432000]
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/12820
- DOI
- 10.1063/1.3432000
- ISSN
- 0034-6748
- Article Type
- Article
- Citation
- REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 81, no. 6, 2010-06
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