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Modeling of breakdown behavior in radio-frequency argon discharges with improved secondary emission model
- Title
- Modeling of breakdown behavior in radio-frequency argon discharges with improved secondary emission model
- Authors
- Radmilovic-Radjenovic, M; Lee, JK
- Date Issued
- Jan-2005
- Publisher
- AMER INST PHYSICS
- ISSN
- 1070-664X
- Article Type
- Article
- Citation
- PHYSICS OF PLASMAS, vol. 12, no. 6, 2005-01
- Files in This Item:
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