Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges
SCIE
SCOPUS
- Title
- Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges
- Authors
- Park, GY; You, SJ; Iza, F; Lee, JK
- Date Issued
- 2007-02-23
- Publisher
- AMERICAN PHYSICAL SOC
- Abstract
- In low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large rf fields in the sheaths while low-energy electrons are confined in the bulk plasma by the ambipolar potential. Low-energy electrons are typically inefficiently heated due to their low collisionality and the weak rf electric field present in the bulk. It is shown, however, that as a result of the nonlinear interaction between the electron motion and the weak rf field present in the bulk, low-energy electrons can be efficiently heated. Electrons in the bulk that bounce inside the electrostatic potential well with a frequency equal to the rf excitation frequency are efficiently heated by the coherent interaction with the rf field. This resonant collisionless heating can be very efficient and manifest itself as a plateau in the electron energy probability function.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/12449
- DOI
- 10.1103/PhysRevLett.98.085003
- ISSN
- 0031-9007
- Article Type
- Article
- Citation
- PHYSICAL REVIEW LETTERS, vol. 98, no. 8, 2007-02-23
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