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Ultralow Contact Resistance (~10-6 Ω∙cm2) between a-IGZO and Metal for Sub-μm Thin-Film Transistors

Title
Ultralow Contact Resistance (~10-6 Ω∙cm2) between a-IGZO and Metal for Sub-μm Thin-Film Transistors
Authors
CHUNG, YOONYOUNGPARK, HYUKJUYOUNG, YUN박성민SEO, TAEWON
Date Issued
2022-08-24
Publisher
IMID
URI
https://oasis.postech.ac.kr/handle/2014.oak/115633
Article Type
Conference
Citation
International Meeting on Information Display (IMID), 2022-08-24
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정윤영CHUNG, YOONYOUNG
Dept of Electrical Enginrg
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