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Effect of the amido Ti precursors on the atomic layer deposition of TiN with NH3

Title
Effect of the amido Ti precursors on the atomic layer deposition of TiN with NH3
Authors
Gihee ChoRhee, SW
Date Issued
Jan-2013
Publisher
American Vacuum Society
URI
http://oasis.postech.ac.kr/handle/2014.oak/11240
DOI
10.1116/1.4764898
ISSN
0734-2101
Article Type
Article
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 31, no. 1, page. 1A117-1 - 1A117-5, 2013-01
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