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Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)(3) (OD=octanedionate)

Title
Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)(3) (OD=octanedionate)
Authors
Lee, JHKim, JYRhee, SWYang, DYKim, DHYang, CHHan, YKHwang, CJ
Date Issued
Jan-2000
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/11215
ISSN
0734-2101
Article Type
Article
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 18, no. 5, page. 2400 - 2403, 2000-01
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