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Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)(3) (OD=octanedionate)
- Title
- Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)(3) (OD=octanedionate)
- Date Issued
- Jan-2000
- Publisher
- AMER INST PHYSICS
- ISSN
- 0734-2101
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 18, no. 5, page. 2400 - 2403, 2000-01
- Files in This Item:
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