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Atomic Layer Deposition ZnO:N Thin Film Transistor: The Effects of N Concentration on the Device Properties

Title
Atomic Layer Deposition ZnO:N Thin Film Transistor: The Effects of N Concentration on the Device Properties
Authors
Lim, SJKim, JMKim, DKwon, SPark, JSKim, H
POSTECH Authors
Kwon, S
Date Issued
Jan-2010
Publisher
ELECTROCHEMICAL SOC INC
URI
http://oasis.postech.ac.kr/handle/2014.oak/11187
DOI
10.1149/1.3269973
ISSN
0013-4651
Article Type
Article
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 157, no. 2, page. H214 - H218, 2010-01
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권순주KWON, SOON JU
Dept of Materials Science & Enginrg
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