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Comparative study of Cu-precursors for 3D focused electron beam induced deposition (vol 151, pg C535, 2004 and vol 151, pg C590, 2004)

Title
Comparative study of Cu-precursors for 3D focused electron beam induced deposition (vol 151, pg C535, 2004 and vol 151, pg C590, 2004)
Authors
Luisier, AUtke, IBret, TCicoira, FHauert, RRhee, SWDoppelt, PHoffmann, P
Date Issued
Jan-2005
Publisher
ELECTROCHEMICAL SOC INC
URI
http://oasis.postech.ac.kr/handle/2014.oak/11145
DOI
10.1149/1.1839579
ISSN
0013-4651
Article Type
Article
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 152, no. 1, 2005-01
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