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Cited 26 time in webofscience Cited 27 time in scopus
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Comparative study of Cu precursors for 3D focused electron beam induced deposition

Title
Comparative study of Cu precursors for 3D focused electron beam induced deposition
Authors
Luisier, AUtke, IBret, TCicoira, FHauert, RRhee, SWDoppelt, PHoffmann, P
Date Issued
Jan-2004
Publisher
ELECTROCHEMICAL SOC INC
URI
http://oasis.postech.ac.kr/handle/2014.oak/11132
DOI
10.1149/1.1765680
ISSN
0013-4651
Article Type
Article
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 151, no. 8, 2004-01
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