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Structural changes of silicon dioxide films caused by synchrotron irradiation
- Title
- Structural changes of silicon dioxide films caused by synchrotron irradiation
- Authors
- Park, YB; Rhee, SW; Imaizumi, Y; Urisu, T
- Date Issued
- Jan-1996
- Publisher
- AMER INST PHYSICS
- ISSN
- 0021-8979
- Article Type
- Article
- Citation
- JOURNAL OF APPLIED PHYSICS, vol. 80, no. 2, page. 1236 - 1238, 1996-01
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