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Effects on InP surface trap states of in situ etching and phosphorus-nitride deposition

Title
Effects on InP surface trap states of in situ etching and phosphorus-nitride deposition
Authors
JEONG, YHTAKAGI, SARAI, FSUGANO, T
POSTECH Authors
JEONG, YH
Date Issued
Sep-1987
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/10436
ISSN
0021-8979
Article Type
Article
Citation
JOURNAL OF APPLIED PHYSICS, vol. 62, no. 6, page. 2370 - 2375, 1987-09
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정윤하JEONG, YOON HA
Dept of Electrical Enginrg
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