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Silicon 내 Phosphorus의 Clustering 거동에 대한 제일원리 연구 및 시뮬레이션

Title
Silicon 내 Phosphorus의 Clustering 거동에 대한 제일원리 연구 및 시뮬레이션
Authors
이동화김재선
Date Issued
25-Oct-2019
Publisher
(사)대한금속재료학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/102065
Article Type
Conference
Citation
2019 대한금속 · 재료학회 추계학술 대회, 2019-10-25
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이동화LEE, DONGHWA
Dept of Materials Science & Enginrg
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