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A Nonlinear Lumped Parameter Model for Designing a Capacitive MEMS Microphone

Title
A Nonlinear Lumped Parameter Model for Designing a Capacitive MEMS Microphone
Authors
MOON, WON KYUCHAYEONG, KIMHONGMIN, AHNYoon Jong LeeHan Choon LeeMinhyun Jung
Date Issued
2019-12-05
Publisher
ACOUSTICAL SOCIETY OF AMERICA
URI
https://oasis.postech.ac.kr/handle/2014.oak/101449
Article Type
Conference
Citation
178th Meeting: Acoustical Society of America, 2019-12-05
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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