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High-quality cobalt thin films by plasma-enhanced atomic layer deposition
- Title
- High-quality cobalt thin films by plasma-enhanced atomic layer deposition
- POSTECH Authors
- Kim, H
- Date Issued
- Jan-2006
- Publisher
- ELECTROCHEMICAL SOC INC
- ISSN
- 1099-0062
- Article Type
- Article
- Citation
- ELECTROCHEMICAL AND SOLID STATE LETTERS, no. 11, 2006-01
- Files in This Item:
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg