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Showing results 1 to 5 of 5
Thesis
A Study on Al/TiO2/Si Capacitor for Ultra High-k Gate Stack

Thesis(Master), 2021

Conference
BCl3/Cl2 plasma etching process of ferroelectric gate stack for device integration

제 30회 한국반도체학술대회, 2023-02-15

Article
H2 Plasma and PMA Effects on PEALD-Al2O3 Films with Different O2 Plasma Exposure Times for CIS Passivation LayersSCIESCOPUS

Nanomaterials, vol. 13, no. 4, page. 731, 2023-02

Conference
PEALD with Post-treatments for Interface Improvement of HfO2-based Metal-Insulator-Semiconductor Structures

제 29회 한국반도체학술대회, 2022-01-25

Conference
Study of continuous-wave RGB laser annealing for the activation of phosphorus/boron-doped Si deep junction with high scan speed

The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023), 2023-03-09

1
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